A new technical paper titled “Scanning electron microscopy-based automatic defect inspection for semiconductor manufacturing: a systematic review” was published by researchers at KU Leuven and imec.

Unlike optical microscopy, SEM does not rely on light waves but instead uses a beam of electrons to interact with materials, enabling magnifications up to 300,000× and resolutions approaching 1 nm. 1 ...

Raman analysis works by shining a laser on a sample and detecting the inelastically scattered photons. The resulting Raman spectrum provides information about the molecular structure and composition ...