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A variable-angle spectroscopic ellipsometer (VASE) is an essential tool for measuring the thickness of a thin film, as well as its n and k optical parameters. However, for films thinner than 10 nm, ...

The ellipsometer is capable of measuring film thicknesses and index of refraction of stacks of thin films including dielectrics.

Authors: Zhimin Zhu; Xianggui Ye; Sean Simmons; Catherine Frank; Tim Limmer; James Lamb Brewer Science, Inc. (United States) A variable-angle spectroscopic ellipsometer (VASE) is an essential tool for ...

Encourages new and existing users to utilize CU Boulder Core Facilities to advance their research.

Ellipsometry is a technique used to characterize optical properties and thicknesses of thin films by measuring the change in polarization state of light reflected from the surface of (or through) a ...